Micro OLEDoS Display Equipment |
EFEM (Mask/Wafer)
HOME >Products > Micro OLEDoS Display Equipment > EFEM (Mask/Wafer)
PRODUCTS
EFEM (Mask / Wafer) |
Features
Specifications
Item | Specification | |
General | MASK size | Customizing available |
Carrier | 3 to 5 slots | |
Color | White : EX4511(S)-WH0009 | |
Load port | Foup for MASK(2 FOUP) | |
Light | LED | |
Display Monitor | LCD Touch Monitor | |
Environment | Internal Pressure monitoring | Diff. pressure display, Interlock |
Operation Environment | Class 1 clean room | |
Particle Performance | ≤ 2.0ea / ≤4.0nm | |
Filter Material | PTFE ULPA Filter | |
Filter Pressure Drop(Pa) | <93.2 (Velocity based) | |
Safety | Signal Tower Lamp | (Red/Green/Yellow) + Buzzer |
EMO | 3 EA (Front / Left / Right) | |
Front Safety type | Light curtain | |
Utility | CDA | 0.5~0.6[MPa] |
Vacuum | - 80 Kpa or less | |
Power | 3Φ AC200~230(V)±(10%) 30(A) 50/60(Hz |
Features
Specifications
Item | Specification | |
General | Wafer size | 300mm Silicon Wafer |
Carrier | 25 Wafers FOUP | |
Color | White : EX4511(S)-WH0009 | |
Load port | 300mm LPM(3 FOUP) | |
Light | LED | |
Display Monitor | LCD Touch Monitor | |
Environment | Internal Pressure monitoring | Diff. pressure display, Interlock |
Operation Environment | Class 1 clean room | |
Particle Performance | ≤ 2.0ea / ≤4.0nm | |
Filter Material | PTFE ULPA Filter (Chemical Filter) | |
Filter Pressure Drop(Pa) | <93.2 (Velocity based) | |
Safety | Signal Tower Lamp | (Red/Green/Yellow) + Buzzer |
EMO | 3 EA (Front / Left / Right) | |
Light curtain | Dual Protection Bar | |
Utility | CDA | 3/8”, ≥ 5 kgf/㎠ |
Vacuum | ≤ - 80 Kpa | |
Power | 208 VAC, 30A + GND |
KOSTEK SYSTEMS, INC.
231, bangkkojigil, Seotan-Myeon, Pyeongtaek-Si, Gyeonggi-Do, Korea
TEL : +82-31-646-1500 FAX : +82-31-646-1515
Email : Sales@kosteks.com
© 2022 KOSTEK SYSTEMS, INC. All Rights Reserved.
KOSTEK SYSTEMS, INC. 231, bangkkojigil, Seotan-Myeon, Pyeongtaek-Si, Gyeonggi-Do, Korea
TEL : +82-31-646-1500 FAX : +82-31-646-1515 Email : Sales@kosteks.com
© 2022 KOSTEK SYSTEMS, INC. All Rights Reserved.