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EFEM (Mask/Wafer)

HOME >Products > Micro OLEDoS Display Equipment > EFEM (Mask/Wafer)


OLEDoS용 EFEM(Mask)

  Features

  • EFEM to be specifically designed to load/unload a fine metal mask into/from the process such as evaporation
  • Various atmospheric robots and pre-aligners adoptable single arm, dual arm, flip robot, etc.
  • Grip type end effector : Prevention of mask damage and particles
  • Automatic and accurate wafer alignment with several types of pre-aligners
  • Easy integration with all processes and metrology equipment

  Specifications

Item

Specification

General

MASK size

Customizing available

Carrier

3 to 5 slots

Color 

White : EX4511(S)-WH0009

Load port

Foup for MASK(2 FOUP)

Light

LED

Display Monitor

LCD Touch Monitor

Environment

Internal Pressure monitoring

Diff. pressure display, Interlock

Operation Environment

Class 1 clean room

Particle Performance

≤ 2.0ea / ≤4.0nm

Filter Material

PTFE ULPA Filter

Filter Pressure Drop(Pa)

<93.2 (Velocity based) 

Safety

Signal Tower Lamp

(Red/Green/Yellow) + Buzzer

EMO 

3 EA (Front / Left / Right)

Front Safety type

Light curtain

Utility

CDA

0.5~0.6[MPa]

Vacuum

- 80 Kpa or less

Power 

3Φ AC200~230(V)±(10%) 30(A) 50/60(Hz

OLEDoS용 EFEM(Wafer)

  Features

  • Various atmospheric robots and pre-aligners adoptable single arm, dual arm, flip robot, etc.
  • Passive end effector with GN-PAD : Prevention of wafer chipping, particles
  • Automatic and accurate wafer alignment with several types of pre-aligners
  • Reliable load port modules & N2 purged FOUP(option)
  • Easy integration with all processes and metrology equipment.

  Specifications

Item

Specification

General

Wafer size

300mm Silicon Wafer

Carrier

25 Wafers FOUP

Color 

White : EX4511(S)-WH0009

Load port

300mm LPM(3 FOUP)

Light

LED

Display Monitor

LCD Touch Monitor

Environment

Internal Pressure monitoring

Diff. pressure display, Interlock

Operation Environment

Class 1 clean room

Particle Performance

≤ 2.0ea / ≤4.0nm

Filter Material

PTFE ULPA Filter

(Chemical Filter)

Filter Pressure Drop(Pa)

<93.2 (Velocity based) 

Safety

Signal Tower Lamp

(Red/Green/Yellow) + Buzzer

EMO 

3 EA (Front / Left / Right)

Light curtain

Dual Protection Bar

Utility

CDA

3/8”, ≥ 5 kgf/㎠

Vacuum

≤ - 80 Kpa

Power 

208 VAC, 30A + GND


KOSTEK SYSTEMS, INC. 

231, bangkkojigil, Seotan-Myeon, Pyeongtaek-Si, Gyeonggi-Do, Korea

TEL : +82-31-646-1500  FAX : +82-31-646-1515

Email : Sales@kosteks.com

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