Vacuum cluster systems consist of transfer modules equipped with vacuum robots and load lock chambers connected to the EFEM. Vacuum Cluster System is a tool for loading and unloading semiconductor wafers by connecting it to the process module of semiconductor process equipment such as CVD, ALD, dry etcher, and sputter used in the semiconductor manufacturing processes. 

Kosteck System's vacuum cluster systems have advantages such as excellent vacuum performance, space-optimized structure, minimum installation space, particle suppression function in vacuum chamber, high productivity, and have kinds of models that can deliver various applications according to  customer requirements.

Transfer Module is available in Parallel, Radial, and Tandem types, and Load Lock Module can be configured with the following features and functions. That is, multi-layer structure, batch type (indexer) that can load 26 wafers, structure to minimize pumping/venting time, moisture reduction by pre-heating/cooling function, installation of a photo ionizer unit capable of removing static electricity, etc.

By appropriately combining the Transfer Module and L/L Module with various models and functions, the highest productivity and optimal process equipment can be configured.