Equipment Front End Module

The EFEM consists of up to 4 load ports, 2 atmospheric robots, 2 buffer units, 2 wafer centering and gripping alignment units, and 2 fan filter units to maintain cleanliness inside the EFEM.

  Features

• Various atmospheric robots and pre-aligners adoptable single arm, dual arm, flip robot, etc.
• Passive end effector with GN-PAD  →  Prevention of wafer chipping, particle
• Automatic and accurate wafer alignment with several types of pre-aligners.
• Reliable load port modules & N2 purged FOUP(option).
• Samsung & SK Hynix spec. satisfaction in accordance with SEMI standard
• Easy integration with all process and metrology equipment.