Equipment Front End Module

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Wafer Transfer System

Equipment Front End Module

The EFEM consists of up to 4 load ports, 2 atmospheric robots, 2 buffer units, 2 wafer centering and gripping alignment units, and 2 fan filter units to maintain cleanliness inside the EFEM.


  • Various atmospheric robots and pre-aligners adoptable single arm, dual arm, flip robot, etc.
  • Passive end effector with GN-PAD  →  Prevention of wafer chipping, particle
  • Automatic and accurate wafer alignment with several types of pre-aligners.
  • Reliable load port modules & N2 purged FOUP(option).
  • Samsung & SK Hynix spec. satisfaction in accordance with SEMI standard
  • Easy integration with all process and metrology equipment.


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TEL : +82-31-646-1500  FAX : +82-31-646-1515

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