Load Port Module

Home  >  Products  >  Semiconductor Equipment  > Wafer Transfer System  > Load Port Module

Wafer Transfer System


LPM is a module that automatically opens and closes the door of a FOUP (Front Opening Universal Pod) containing semiconductor wafers and allows wafers to be transferred. The numbers of LPM to be equiped is determined according to the application specifications and wafer throughput, and N2 Purge LPM is optimized to prevent contamination inside the FOUP.

  • High-reliability design delivers trouble-free operation over a long period of time.
  • Easy positioning mechanism to reduce installation time for mounting and dismounting
  • N2 Purging into the FOUP
  • Compatible with extra N2 Purge/Stage Kit  (Easy Maintenance) 


231, bangkkojigil, Seotan-Myeon, Pyeongtaek-Si, Gyeonggi-Do, Korea

TEL : +82-31-646-1500  FAX : +82-31-646-1515

Email : Sales@kosteks.com

© 2022 KOSTEK SYSTEMS, INC. All Rights Reserved.