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Load Port Module

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Wafer Transfer System


PRODUCTS


LOAD PORT MODULE

LPM is a module that automatically opens and closes the door of a FOUP (Front Opening Universal Pod) containing semiconductor wafers and allows wafers to be transferred. The numbers of LPM to be equiped is determined according to the application specifications and wafer throughput, and N2 Purge LPM is optimized to prevent contamination inside the FOUP.


  • High-reliability design delivers trouble-free operation over a long period of time.
  • Easy positioning mechanism to reduce installation time for mounting and dismounting
  • N2 Purging into the FOUP
  • Compatible with extra N2 Purge/Stage Kit  (Easy Maintenance) 


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