Vacuum Cluster System

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Wafer Transfer System

MAXIMA Series

MAXIMA series are designed for superior performance and high throughput, and offer various specialized options. Up to 6 process modules can be configured, which can greatly improve productivity, especially for process equipment that requires high vacuum or high temperature processes

  Features

  • Providing up to 8 sided transfer chamber
  • 2 slotted LL or  25 wafers batch LL
  • Available to apply pre-heat and post cool in LL chamber (option)  
  • Field proven vacuum robot with AWC feature

  Specifications

  • Wafer Placement repeatability : ≤ ± 0.1 mm
  • Base Pressure : 10-3Torr(Available for 10-8Torr)
  • Particle  : ≤ 5 ea @40nm
  • UPEH :   148   wafers/hr
  • SEMI / MESC Compatible
  • CE Mark and SEMI S2 Satisfied

KOSTEK SYSTEMS, INC. 

231, bangkkojigil, Seotan-Myeon, Pyeongtaek-Si, Gyeonggi-Do, Korea

TEL : +82-31-646-1500  FAX : +82-31-646-1515

Email : Sales@kosteks.com

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