Equipment Front End Module

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Wafer Transfer System

STANDARD EFEM

  Features

  • Variety atmospheric robots and pre-aligners adoptable single arm, dual arm, flip robot, etc.
  • Passive end effector with GN-PAD →  Prevention of wafer chipping, particle
  • Automatic and accurate wafer alignment with several types of pre-aligners.
  • Easy integration with all processes and metrology equipment.

KOSTEK SYSTEMS, INC. 

231, bangkkojigil, Seotan-Myeon, Pyeongtaek-Si, Gyeonggi-Do, Korea

TEL : +82-31-646-1500  FAX : +82-31-646-1515

Email : Sales@kosteks.com

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