Wafer Transfer Robot

We can support your selection of products and robot development consultations in connection with  your technical requests.

Wafer transfer robots combines fast swap arm sets, continuous rotation, and proprietary servo controls to provide higher throughput and enable increased productivity. Available in many configurations, safely transfer single or multiple wafers simultaneously between process modules in cluster tools and in linear configurations.

  Key Benefits:

• Maximum throughput and productivity
• Best-in-class wafer placement repeatability
• Globally qualified at major fabs
• Available global installation support, training, and services