Semiconductor Equipment |
Pre-Aligner
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Wafer Transfer System |
PRODUCTS
Features
Specifications
Item | Specification |
Handling Object | 200 ~ 300 mm SEMI standard Silicon wafer (orientation flat, notch) |
Processing time | 2.5 seconds or less (when processing 300mm) |
Alignment accuracy | XY=±0.1mm or less T=±0.1°or less |
Wafer off-center limit | ±5mm or less (wafer offset from chuck center) |
Wafer holding method | Backside vacuum chuck (55 mm) |
Alignment sensor | Edge detection by line sensor to discriminate light intensity |
Power source | 24V DC±10%, 5A, 1-line |
Vacuum | -80KPa or less, 1-line |
Weight | Approx. 12kg |
Edge Grip Pre-Aligner
Features
Specifications
Item | Specification |
Handling Object | 200 & 300 mm SEMI standard Silicon wafer |
Processing time | 8 seconds or less (when processing 300mm) |
Alignment accuracy | ±0.2°or less |
Wafer holding method | Wafer-edge partial gripping |
Wafer contact material | PEEK |
Control system | Command control through RS-232C interface |
Power source | 24V DC±10%, 3A, 1-line |
Dry air | 6-mm tubing, 0.35-0.4MPa, 10 liters/min or more |
Weight | Approx. 8kg |
KOSTEK SYSTEMS, INC.
231, bangkkojigil, Seotan-Myeon, Pyeongtaek-Si, Gyeonggi-Do, Korea
TEL : +82-31-646-1500 FAX : +82-31-646-1515
Email : Sales@kosteks.com
© 2022 KOSTEK SYSTEMS, INC. All Rights Reserved.
KOSTEK SYSTEMS, INC. 231, bangkkojigil, Seotan-Myeon, Pyeongtaek-Si, Gyeonggi-Do, Korea
TEL : +82-31-646-1500 FAX : +82-31-646-1515 Email : Sales@kosteks.com
© 2022 KOSTEK SYSTEMS, INC. All Rights Reserved.